Semiconductor Grade Six-Channel Air Particle Counter Y09-SC100
Y09-SC100 Semiconductor Grade Six-Channel Air Particle Counter for Wafer Fab
The Y09-SC100 Semiconductor Grade Six-Channel Air Particle Counter is engineered from the ground up for the extraordinary cleanliness requirements of modern semiconductor wafer fabrication facilities. In advanced semiconductor manufacturing where critical feature dimensions are measured in nanometers, even single-digit particle counts in the cleanroom environment can cause killer defects that destroy integrated circuit functionality and reduce production yield. The Y09-SC100 addresses this challenge by combining ultra-clean materials and construction with precision particle detection capable of supporting ISO Class 1 (Class 0.1) cleanroom certification and monitoring programs at the most advanced semiconductor manufacturing nodes.
The instrument enclosure is fabricated from 316L electropolished stainless steel, selected for its exceptional corrosion resistance, minimal particle shedding characteristics, and compatibility with the aggressive cleanroom cleaning protocols employed in semiconductor facilities. All internal components are screened for ultra-low volatile organic compound (VOC) outgassing to prevent molecular contamination that can compromise photolithography processes. The Y09-SC100 carries SEMI S2 and S8 safety certifications, confirming compliance with the semiconductor industry's stringent equipment safety standards for environmental, health, and safety considerations. Full electrostatic discharge (ESD) safe design protects sensitive semiconductor wafers and devices from electrostatic damage during monitoring activities in production areas.
Key Features| Parameter | Specification |
|---|---|
| Flow Rate | 100 L/min (3.53 CFM) |
| Particle Size Channels | 0.3, 0.5, 1.0, 3.0, 5.0, 10.0 μm |
| SEMI Compliance | SEMI S2 (Safety), SEMI S8 (Ergonomics) |
| Housing Material | 316L Electropolished Stainless Steel |
| Outgassing Classification | Ultra-Low VOC (per SEMI F21) |
| ESD Protection | Full ESD-Safe Design, Conductive Housing |
| Light Source | Long-Life Laser Diode, 30,000+ hours MTBF |
| Communication Interfaces | RS-485 Modbus RTU, Ethernet TCP/IP, USB 2.0 |
| Remote Access | Embedded Web Server, Browser-Based Dashboard |
| Data Storage | 100,000 records with facility/location tagging |
| Cleanroom Compatibility | ISO Class 1-8, SEMI E49/E70 Standards |
| Power Supply | AC 100-240V 50/60Hz; Li-ion battery 6+ hours |
| Display | 7-inch color touchscreen, ESD-safe overlay |
| Dimensions (WxDxH) | 325 x 295 x 160 mm |
| Weight | 7.2 kg (stainless steel construction) |
The Y09-SC100 serves advanced semiconductor manufacturing facilities across the full range of cleanroom monitoring applications. In wafer fabrication cleanrooms operating at ISO Class 1-3, the instrument provides the high-sensitivity particle monitoring essential for contamination control in photolithography areas where 193nm immersion and EUV lithography tools demand extraordinarily clean environments to maintain process yield. The instrument supports continuous monitoring in wafer processing bays for deposition, etching, ion implantation, and chemical mechanical planarization (CMP) operations where maintaining stable cleanroom conditions is critical for process control.
Semiconductor packaging and test facilities utilize the Y09-SC100 for ISO Class 5-8 cleanroom monitoring in wafer bumping, flip-chip assembly, and advanced packaging operations. Photomask manufacturing facilities employ the instrument for ultra-clean environment monitoring in mask blank production and patterning areas where sub-micron contamination directly impacts photomask quality. Compound semiconductor facilities producing RF, optoelectronic, and power devices benefit from the instrument's compatibility with specialized cleanroom environments. The Y09-SC100 also supports semiconductor equipment manufacturers performing cleanroom qualification and acceptance testing of process tools prior to shipment and installation at customer fabrication facilities.
Packaging & Quality AssuranceEach Sujing air particle counter is carefully packaged in a durable export-grade carton with high-density foam inserts ensuring maximum protection during international shipping. Standard packaging includes the main instrument unit, isokinetic sampling probe, power adapter with charging cable, zero-count filter, thermal printer paper roll, USB communication cable, PC software installation media, calibration certificate, comprehensive user manual, and protective carrying case. All shipments undergo thorough pre-dispatch inspection including functional testing across all six particle channels, zero-count verification, flow rate calibration check, and communication interface testing.
Sujing Instrument maintains an ISO 9001:2015 certified quality management system with complete traceability from raw material sourcing through final product delivery. Each instrument undergoes rigorous quality assurance testing including 24-hour burn-in, multi-point calibration verification, and full functional validation before release. We provide comprehensive after-sales support including a 12-month standard warranty, lifetime technical consultation, remote diagnostic assistance, and optional on-site calibration with maintenance services performed by factory-trained technicians. Our global service network covers over 60 countries worldwide.
For regulated industries requiring formal cleanroom compliance documentation, we provide complete qualification and validation support packages including Installation Qualification (IQ), Operational Qualification (OQ), and Performance Qualification (PQ) protocols upon request. Our application engineering team is available to assist with custom configurations and specialized monitoring solutions.